單晶硅超純水設(shè)備

型號(hào)：?jiǎn)尉Ч璩兯O(shè)備
電壓：220V
特點(diǎn)：可生產(chǎn)一級(jí)、二級(jí)、三級(jí)純水
應(yīng)用：?jiǎn)尉Ч鑼?shí)驗(yàn)室、生產(chǎn)使用超純水

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單晶硅超純水設(shè)備

單硅晶體超純水設(shè)備主要作用是用于清除表面污染雜質(zhì)，包括有機(jī)物和無(wú)機(jī)物，這些雜質(zhì)有的是以原子狀態(tài)、離子狀態(tài)、薄膜形式、顆粒形式存在與硅片的表面。有機(jī)污染包括光刻膠、有機(jī)溶劑殘留物、有機(jī)污染包括光刻膠、有機(jī)溶劑殘留物、合成蠟和人接觸器件、工具、器皿帶來(lái)的油脂或纖維。無(wú)機(jī)污染包括重金屬鉻、銅、鐵、金等，嚴(yán)重影響少數(shù)載流子壽命和表面電導(dǎo);堿金屬如鈉等，引起嚴(yán)重漏電;顆粒污染源則包括有機(jī)膠體纖維、微生物、細(xì)菌、塵埃、硅渣等物質(zhì)，這類物質(zhì)都會(huì)在生產(chǎn)過程中造成不同程度的危害，所以現(xiàn)在的半導(dǎo)體器件生產(chǎn)、太陽(yáng)能電池硅片、多晶硅、單晶硅的生產(chǎn)過程中都需要使用超純水進(jìn)行沖洗，保證整體過程受到的危害降到最小。

滲源純水企業(yè)生產(chǎn)的單硅晶體超純水設(shè)備采用的是國(guó)內(nèi)先進(jìn)的科技，并搭配使用國(guó)際進(jìn)口零部件，加上公司獨(dú)到的管理經(jīng)驗(yàn)理念，生產(chǎn)出滿足于單硅晶體行業(yè)應(yīng)用的高質(zhì)量超純水設(shè)備。

工藝流程：

原水箱→原水提升泵→石英砂過濾器→活性炭過濾器→軟水器→精密過濾器→一級(jí)高壓泵→一級(jí)反滲透→級(jí)間水箱→二級(jí)高壓泵→中間水箱→EDI提升泵→微孔過濾器→EDI系統(tǒng)→EDI水箱→拋光混床→用水點(diǎn)（≥18.2MΩ.CM）

設(shè)備性能：

1.預(yù)處理系統(tǒng)是采用目前技術(shù)的裝置，它的凈水效果顯著?？梢匀コ械牡募?xì)菌、泥沙、膠體、懸浮物、異味等雜質(zhì)。如果水中的硬度較高時(shí)，則還會(huì)降低水中的硬度。
2.反滲透技術(shù)主要由高壓泵、膜克、還有進(jìn)口反滲透膜的組件、儀表、控制電氣等組成。使其水中的電導(dǎo)率下降，電阻率提升。
3.后處理部分是對(duì)反滲透制取的純水做更進(jìn)一步的深化處理。使其出水的電阻率可以到18.2兆歐，從而使生產(chǎn)出來(lái)的水達(dá)到最佳的晶片清洗標(biāo)準(zhǔn)。
4.超純水設(shè)備的脫鹽核心部件為進(jìn)口的反滲透膜組件，超純水設(shè)備一般都是有預(yù)處理裝置、反滲透技術(shù)、后處理由拋光混床、EDI系統(tǒng)部分共同組成，使其凈水的效果顯著。
經(jīng)過這幾部分處理之后的水能夠滿足于單晶硅清洗用超純水用水要求，部分生產(chǎn)企業(yè)要求水中不能含有微生物、真菌等，所以會(huì)在后面加裝紫外燈殺菌裝置來(lái)確保水質(zhì)達(dá)到生產(chǎn)所需。

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